基本信息:
- 专利标题: APPARATUS FOR PROCESSING AN OBJECT WITH HIGH POSITION ACCURANCY
- 专利标题(中):用于以高位准确度处理对象的装置
- 申请号:PCT/IB0305935 申请日:2003-12-15
- 公开(公告)号:WO2004055607A3 公开(公告)日:2004-12-16
- 发明人: VAN EIJK JAN , BAKKER ARJAN F , BOS DENNIS E , COMPTER JOHAN C , DE KLERK ANGELO C P , ROES FRANCISCUS M , VROOMEN HUBERT G J J A , WARMERDAM THOMAS P H
- 申请人: KONINKL PHILIPS ELECTRONICS NV , VAN EIJK JAN , BAKKER ARJAN F , BOS DENNIS E , COMPTER JOHAN C , DE KLERK ANGELO C P , ROES FRANCISCUS M , VROOMEN HUBERT G J J A , WARMERDAM THOMAS P H
- 专利权人: KONINKL PHILIPS ELECTRONICS NV,VAN EIJK JAN,BAKKER ARJAN F,BOS DENNIS E,COMPTER JOHAN C,DE KLERK ANGELO C P,ROES FRANCISCUS M,VROOMEN HUBERT G J J A,WARMERDAM THOMAS P H
- 当前专利权人: KONINKL PHILIPS ELECTRONICS NV,VAN EIJK JAN,BAKKER ARJAN F,BOS DENNIS E,COMPTER JOHAN C,DE KLERK ANGELO C P,ROES FRANCISCUS M,VROOMEN HUBERT G J J A,WARMERDAM THOMAS P H
- 优先权: EP02080317 2002-12-16
- 主分类号: F16C39/06
- IPC分类号: F16C39/06 ; G03F7/20 ; G03F9/00 ; H01J37/20 ; H01J37/317 ; H01L21/68 ; H02K11/00 ; H02K41/03
摘要:
A apparatus processes an object (19), such as a semi-conductor wafer at accurately controlled positions. The object (19) is supported by a working platform (12) that is moveable along a path. A suspension actuator part (14) attached to the working platform (12), contains a soft magnetic core (24) with poles facing the surface of a soft magnetic element (34) on the support structure along the path and a winding (20) for application of a current to generate a magnetic field that runs through the core (24) via the poles and returns via the soft magnetic element (34). A sensor (17) senses a measured position of the suspension actuator part (14) relative to the position reference element (16). A control circuit comprises an outer control circuit (40) and an inner control circuit (42). The outer control circuit (40) receives a sensing result and determines force set point information to regulate the measured position of the actuator part (14) to a required value. The inner control circuit (42) receives the force set point information and controls the current to realize a force between the actuator part (14) and the support structure (10) according to the force set point information.
摘要(中):
装置在准确控制的位置处处理诸如半导体晶片的物体(19)。 物体(19)由可沿着路径移动的工作平台(12)支撑。 附接到工作平台(12)的悬架致动器部件(14)包含软磁芯(24),其具有面向支撑结构上沿着该路径的软磁元件(34)的表面的极和绕组(20) 用于施加电流以产生磁场,该磁场经由磁极穿过磁芯(24)并经由软磁元件(34)返回。 传感器(17)感测悬架致动器部件(14)相对于位置参考元件(16)的测量位置。 控制电路包括外部控制电路(40)和内部控制电路(42)。 外部控制电路(40)接收感测结果并确定力设定点信息以将致动器部分(14)的测量位置调节到所需值。 内部控制电路(42)接收力设定点信息并根据力设定点信息控制电流以实现致动器部分(14)与支撑结构(10)之间的力。
IPC结构图谱:
F | 机械工程;照明;加热;武器;爆破 |
--F16 | 工程元件或部件;为产生和保持机器或设备的有效运行的一般措施;一般绝热 |
----F16C | 轴;软轴;曲轴机构的元件;除传动元件以外的转动部件;轴承 |
------F16C39/00 | 轴承卸载 |
--------F16C39/06 | .用磁力方法 |