基本信息:
- 专利标题： METHOD OF PRODUCING A HIGH DENSITY PATTERN OF ISOLATED CLUSTERS
- 专利标题（中）：生产隔离群集高密度图案的方法
- 申请号：PCT/CA0301581 申请日：2003-10-17
- 公开(公告)号：WO2004035855A8 公开(公告)日：2004-07-08
- 发明人： SACHER EDWARD , PIYAKIS KONSTANTINOS , YANG DE-QUAN
- 申请人： ECOLE POLYTECH , SACHER EDWARD , PIYAKIS KONSTANTINOS , YANG DE-QUAN
- 专利权人： ECOLE POLYTECH,SACHER EDWARD,PIYAKIS KONSTANTINOS,YANG DE-QUAN
- 当前专利权人： ECOLE POLYTECH,SACHER EDWARD,PIYAKIS KONSTANTINOS,YANG DE-QUAN
- 优先权： US41910902 2002-10-18
- 主分类号： C23C14/02
- IPC分类号： C23C14/02 ; C23C14/04 ; C23C14/58 ; G11B5/00 ; G11B5/74 ; G11B9/00
摘要：
The present invention relates to a method of producing a high density pattern of isolated clusters on a surface of a substrate, comprising treating the surface of the substrate to produce element-adhesion sites distributed on the surface of the substrate in accordance with the pattern, depositing a first transition series element on the surface of the substrate, and forming, by diffusion and/or coalescence, clusters of the deposited element on the elementadhesion sites. The size of the clusters can be manipulated by irradiating the clusters with a low energy ion beam to cause coalescence of the clusters and diffusion of these clusters on the surface of the substrate whereby the size of the clusters is changed. The surface of the substrate can also be irradiated at a grazing angle with a low energy ion beam to modify the surface of the substrate and thereby enhance adhesion of the clusters of the deposited element to the modified surface. Finally, contact mode atomic force microscopy can be used for surface local cleaning and cluster assembling by applying an atomic force microscopy tip to the surface of the substrate and scanning with this tip a region of the substrate surface.
摘要（中）：
本发明涉及一种在基板表面上制造隔离簇的高密度图案的方法，包括处理基板的表面以产生根据图案分布在基板的表面上的元件粘附位置，沉积 在衬底的表面上的第一过渡系列元件，并且通过扩散和/或聚结形成沉积元素的簇在元素粘附位点上。 可以通过用低能量离子束照射簇来操纵簇的尺寸，以引起簇的聚结和这些簇在衬底表面上的扩散，从而改变簇的尺寸。 基板的表面也可以以低能离子束以掠射角照射，以改变基板的表面，从而增强沉积元件的簇到修饰表面的粘附。 最后，接触模式原子力显微镜可用于表面局部清洁和簇组装，其中通过将原子力显微镜尖端施加于基底表面并用该尖端扫描基底表面的一个区域。