基本信息:
- 专利标题: SUPERCONDUCTING DEVICE
- 专利标题(英):Superconducting device
- 专利标题(中):超级设备
- 申请号:PCT/AU1999/000773 申请日:1999-09-14
- 公开(公告)号:WO00016413A1 公开(公告)日:2000-03-23
- 主分类号: H01L39/24
- IPC分类号: H01L39/24 ; H01L39/02 ; H01L39/06
摘要:
An operative high critical temperature superconducting (HTSC) device (20) and method therefor are provided. The HTSC device (20) includes a niobium inhibitor (24) deposited over selected regions (23) of the surface of a substrate (21). A superconducting material (25) is deposited over substantially the entire surface of the substrate (21). The superconducting material (25) possesses a high resistivity in the selected regions (23) and exhibits superconducting characteristics only in regions (22) in which the niobium inhibitor (24) has not been deposited. In accordance with the method of the present invention, the formation of the (HTSC) device includes the step of providing an atmosphere of argon and oxygen and subjecting the device to RF plasma sputtering at controlled temperature and pressure.
摘要(中):
提供了一种操作性高临界温度超导(HTSC)器件(20)及其方法。 HTSC器件(20)包括沉积在衬底(21)的表面的选定区域(23)上的铌抑制剂(24)。 超导材料(25)沉积在基底(21)的基本整个表面上。 超导材料(25)在所选择的区域(23)中具有高电阻率,并且仅在没有沉积铌抑制剂(24)的区域(22)中显示出超导特性。 根据本发明的方法,(HTSC)器件的形成包括提供氩气和氧气的步骤,并在受控的温度和压力下对器件进行RF等离子体溅射。
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L39/00 | 应用超导电性的或高导电性的器件,专门适用于制造或处理这些器件或其部件的方法或设备 |
--------H01L39/24 | .专门适用于制造或处理包含在H01L39/00组内的器件或其部件的方法或设备 |