基本信息:
- 专利标题: FABRICATING INTERCONNECTS AND TIPS USING SACRIFICIAL SUBSTRATES
- 专利标题(中):制造互连和使用基板的提示
- 申请号:PCT/US1996008107 申请日:1996-05-24
- 公开(公告)号:WO1996037332A1 公开(公告)日:1996-11-28
- 发明人: FORMFACTOR, INC.
- 申请人: FORMFACTOR, INC. , KHANDROS, Igor, Y. , ELDRIDGE, Benjamin, N. , MATHIEU, Gaetean, L.
- 专利权人: FORMFACTOR, INC.,KHANDROS, Igor, Y.,ELDRIDGE, Benjamin, N.,MATHIEU, Gaetean, L.
- 当前专利权人: FORMFACTOR, INC.,KHANDROS, Igor, Y.,ELDRIDGE, Benjamin, N.,MATHIEU, Gaetean, L.
- 优先权: US8/452,255 19950526; US8/526,246 19950921; US8/533,584 19951018; US8/554,902 19951109; ATPCT/US95/14909 19951113; US8/558,332 19951115; US60/005,189 19960517
- 主分类号: B23K31/02
- IPC分类号: B23K31/02
摘要:
Interconnection elements (752) and/or tip structures (770) for interconnection elements (752) may first be fabricated upon sacrificial substrates (702) for subsequent mounting to electronic components (784). In this manner, the electronic components (784) are not "at risk" during the fabrication process. The sacrificial substrate (702) establishes a predetermined spatial relationship between the interconnection elements (752) which may be composite interconnection elements (752) having a relatively soft elongate element (752) as a core and a relatively hard (springy material) overcoat (754). Interconnection elements (752) may be fabricated upon tip structures (770), or may first be mounted to the electronic component (784) and the tip structures (770) joined to the free-ends of the interconnection elements (752). Tip structures (770) formed as cantilever beams are described.
摘要(中):
用于互连元件(752)的互连元件(752)和/或尖端结构(770)可首先制造在牺牲基板(702)上,以便随后安装到电子部件(784)。 以这种方式,电子部件(784)在制造过程中不“处于危险中”。 牺牲衬底(702)在互连元件(752)之间建立预定的空间关系,其可以是具有作为芯的相对柔软的细长元件(752)和相对硬(弹性材料)外涂层(754)的复合互连元件(752) )。 互连元件(752)可以制造在尖端结构(770)上,或者可以首先安装到电子部件(784),并且尖端结构(770)连接到互连元件(752)的自由端。 描述形成为悬臂梁的尖端结构(770)。