发明申请
WO1996036990A1 SILICON-BASED SEMICONDUCTOR COMPONENT WITH A POROUS LAYER AND PROCESS FOR PRODUCING POROUS SILICON LAYERS
审中-公开
基本信息:
- 专利标题: SILICON-BASED SEMICONDUCTOR COMPONENT WITH A POROUS LAYER AND PROCESS FOR PRODUCING POROUS SILICON LAYERS
- 专利标题(中):半导体部件基于硅以及制备多孔硅层的多孔层和方法
- 申请号:PCT/DE1996000914 申请日:1996-05-15
- 公开(公告)号:WO1996036990A1 公开(公告)日:1996-11-21
- 发明人: HAHN-MEITNER-INSTITUT BERLIN GMBH
- 申请人: HAHN-MEITNER-INSTITUT BERLIN GMBH , DITTRICH, Thomas , FLIETNER, Hans , LEWERENZ, Hans-Joachim , RAPPICH, Jörg , RAUSCHER, Stefan , SIEBER, Ina
- 专利权人: HAHN-MEITNER-INSTITUT BERLIN GMBH,DITTRICH, Thomas,FLIETNER, Hans,LEWERENZ, Hans-Joachim,RAPPICH, Jörg,RAUSCHER, Stefan,SIEBER, Ina
- 当前专利权人: HAHN-MEITNER-INSTITUT BERLIN GMBH,DITTRICH, Thomas,FLIETNER, Hans,LEWERENZ, Hans-Joachim,RAPPICH, Jörg,RAUSCHER, Stefan,SIEBER, Ina
- 优先权: DE195 19950519; DE195 19950519
- 主分类号: H01L21/306
- IPC分类号: H01L21/306
摘要:
Silicon-based semiconductor components - solar cells, protodectectors, LEDs - can be made with a porous layer on the adjacent substrate surface. Porous silicon can be produced by the electrochemical surface modification of flat silicon bodies. The physical properties of ultra-thin layers with nanoporous structures and their electrical or optical and opto-electric properties of high quality can be obtained. The production processes are compatible with preparation measures for other purposes. Such porous layers UPSL are ultra-thin - 20 to 100 or 150 nm - with pore diameters of up to 10 nm. Homogeneity is attained in both features. In addition, the type of conductivity and the doping concentration of the substrate material are independent. Said material may, for example, be pure Si, SiC or SiGe; it is single or polycrystalline and p conductive (solar cell, photodetector) or n conductive (LED). Layer thicknesses can be predetermined if a 0.1 to 0.7 molar aqueous electrolyte with a pH of 3.5 +/- 0.5 is used and the maximum anodisation current is kept between 0.3 and 2.1 mA/cm depending on its concentration. The treatment time can be adjusted via a reference value of flowed electric charge per unit area.
摘要(中):
基于硅的半导体器件 - 太阳能电池,光电探测器,发光二极管 - 可与相邻基片表面上的多孔层而形成。 多孔硅可以通过电化学表面改性浅硅体来生产。 超薄层的物理性能,具有纳米多孔结构,以及它们的电或光学和电光学特性,可以提供具有高品质。 制造过程与制备措施到其它类型的用途相容。 这种多孔层是超薄UPSL - 20纳米至100纳米或150纳米 - 和具有直径达10nm的孔径。 在这两方面,存在同质化。 此外,存在的导电类型和基片材料的掺杂剂浓度的独立性。 这例如由 纯Si,SiC或SiGe构成,是单晶或多晶及p型(太阳能电池中,光电检测器)或n型(发光二极管)。 层厚度可以由具有3.5的pH +/- 0.5和在其浓度,为0.3毫安/厘米<2>的最大阳极化电流的功能的0.1采用〜0.7摩尔水电解质来指定 和2.1毫安/平方厘米保持<2>。 治疗持续时间可以被设置为通过设定点流出的每单位面积电荷。
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L21/00 | 专门适用于制造或处理半导体或固体器件或其部件的方法或设备 |
--------H01L21/02 | .半导体器件或其部件的制造或处理 |
----------H01L21/027 | ..未在H01L21/18或H01L21/34组中包含的为进一步的光刻工艺在半导体之上制作掩膜 |
------------H01L21/18 | ...器件有由周期表第Ⅳ族元素或含有/不含有杂质的AⅢBⅤ族化合物构成的半导体,如掺杂材料 |
--------------H01L21/26 | ....用波或粒子辐射轰击的 |
----------------H01L21/302 | .....改变半导体材料的表面物理特性或形状的,例如腐蚀、抛光、切割 |
------------------H01L21/306 | ......化学或电处理,例如电解腐蚀 |