基本信息:
- 专利标题： Heater pedestal
- 申请号：US29711377 申请日：2019-10-30
- 公开(公告)号：USD884855S1 公开(公告)日：2020-05-19
- 设计人： Mahesh Ramakrishna , Naman Apurva
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： APPLIED MATERIALS, INC.
- 当前专利权人： APPLIED MATERIALS, INC.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan, LLP
- LOC分类号： 23-03
摘要：
FIG. 1 is an isometric top view of a heater pedestal showing our new design;
FIG. 2 is an isometric bottom view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a top plan view thereof;
FIG. 5 is a side elevational view thereof along lines 5-5 of FIG. 1, the opposite side elevational view being identical;
FIG. 6 is a side cross-sectional view thereof along lines 6-6 of FIG. 4;
FIG. 7 is a detail view thereof shown in FIG. 4;
FIG. 8 is a partial sectional view thereof along lines 8-8 of FIG. 4;
FIG. 9 is a side cross-sectional view thereof along lines 9-9 of FIG. 4;
FIG. 10 is a detail view of the sectional view thereof shown in FIG. 6;
FIG. 11 is a detail view of the sectional view thereof shown in FIG. 6;
FIG. 12 is a detail view of the sectional view thereof shown in FIG. 6;
FIG. 13 is a detail view of the sectional view thereof shown in FIG. 6;
FIG. 14 is a detail view of the sectional view thereof shown in FIG. 9;
FIG. 15 is a partial sectional view thereof along lines 15-15 of FIG. 4; and,
FIG. 16 is a detail view of the sectional view thereof shown in FIG. 9.
FIG. 2 is an isometric bottom view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a top plan view thereof;
FIG. 5 is a side elevational view thereof along lines 5-5 of FIG. 1, the opposite side elevational view being identical;
FIG. 6 is a side cross-sectional view thereof along lines 6-6 of FIG. 4;
FIG. 7 is a detail view thereof shown in FIG. 4;
FIG. 8 is a partial sectional view thereof along lines 8-8 of FIG. 4;
FIG. 9 is a side cross-sectional view thereof along lines 9-9 of FIG. 4;
FIG. 10 is a detail view of the sectional view thereof shown in FIG. 6;
FIG. 11 is a detail view of the sectional view thereof shown in FIG. 6;
FIG. 12 is a detail view of the sectional view thereof shown in FIG. 6;
FIG. 13 is a detail view of the sectional view thereof shown in FIG. 6;
FIG. 14 is a detail view of the sectional view thereof shown in FIG. 9;
FIG. 15 is a partial sectional view thereof along lines 15-15 of FIG. 4; and,
FIG. 16 is a detail view of the sectional view thereof shown in FIG. 9.