发明公开
US20240387632A1 SEMICONDUCTOR STRUCTURE WITH DIELECTRIC WALL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
审中-公开
![SEMICONDUCTOR STRUCTURE WITH DIELECTRIC WALL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME](/abs-image/US/2024/11/21/US20240387632A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: SEMICONDUCTOR STRUCTURE WITH DIELECTRIC WALL STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- 申请号:US18318393 申请日:2023-05-16
- 公开(公告)号:US20240387632A1 公开(公告)日:2024-11-21
- 发明人: Yu-Lung TUNG , Xiaodong WANG , Jhon-Jhy LIAW
- 申请人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsinchu
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L21/8238 ; H01L27/092 ; H01L29/423 ; H01L29/66 ; H01L29/775 ; H01L29/786
摘要:
Semiconductor structures and methods for manufacturing the same are provided. The semiconductor structure includes a first well region, a second well region, a third well region, and a fourth well region. The semiconductor structure includes a dielectric wall structure formed over a boundary of the first well region and the second well region and longitudinally oriented along a first direction and first channel structures, second channel structures, third channel structures, and fourth channel structures vertically suspended. In addition, the first channel structures are attached to a first sidewall surface of the dielectric wall structure, and the second channel structures are attached to a second sidewall surface of the dielectric wall structure. Furthermore, the second channel structures have a second width in the second direction, the third channel structures have a third width in the second direction, and the second width is greater than the third width.