发明申请
US20230069600A1 INTERFACE MODULE WITH SAFETY INTERLOCK SYSTEM, STORAGE MEDIUM, AND SAFETY VERIFICATION METHOD
有权
基本信息:
- 专利标题： INTERFACE MODULE WITH SAFETY INTERLOCK SYSTEM, STORAGE MEDIUM, AND SAFETY VERIFICATION METHOD
- 申请号：US17823249 申请日：2022-08-30
- 公开(公告)号：US20230069600A1 公开(公告)日：2023-03-02
- 发明人： Masashi Nakano , Wataru Kobayashi
- 申请人： ASM IP Holding, B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding, B.V.
- 当前专利权人： ASM IP Holding, B.V.
- 当前专利权人地址： NL Almere
- 主分类号： F16P3/08
- IPC分类号： F16P3/08 ; B25J21/00 ; F24F11/00 ; G05B19/05 ; F04D27/00 ; G08B7/06 ; G08B21/18
摘要：
Examples of an interface module includes a fan filter unit having a fan and a filter, a housing surrounding a space adjacent to the filter, the housing includes a door, an upper housing surrounding a space adjacent to the fan, a first port provided in the upper housing, a second port communicating to a FFU internal space, the FFU internal space is a space between the fan and the filter in the fan filter unit, and a differential pressure gauge connected to the first port and the second port to detect a differential pressure between an interior of the upper housing and the FFU internal space.
IPC结构图谱:
| F | 机械工程；照明；加热；武器；爆破 |
| --F16 | 工程元件或部件；为产生和保持机器或设备的有效运行的一般措施；一般绝热 |
| ----F16P | 一般安全装置 |
| ------F16P3/00 | 与机器的控制或操作连接在一起作用的安全装置；要求人体两部分或多部分同时使用的控制装置 |
| --------F16P3/08 | .与闭锁门、罩子、挡板或类似接近运动机件的元件相结合 |