基本信息:
- 专利标题： CMUT TRANSDUCER
- 申请号：US17637712 申请日：2020-08-25
- 公开(公告)号：US20220274134A1 公开(公告)日：2022-09-01
- 发明人： Dominique GROSS , Cyril MEYNIER , Nicolas SENEGOND
- 申请人： VERMON SA
- 申请人地址： FR Tours
- 专利权人： VERMON SA
- 当前专利权人： VERMON SA
- 当前专利权人地址： FR Tours
- 国际申请： PCT/IB2020/000732 WO 20200825
- 主分类号： B06B1/02
- IPC分类号： B06B1/02
摘要：
The present disclosure relates to a CMUT transducer (200) comprising: a substrate (101) coated with a dielectric layer (103); a cavity (105) formed in the dielectric layer (103); a conductive or semiconductor membrane (107) suspended above the cavity (105); and a dielectric coating (104) arranged on an upper surface of the substrate (101) at the bottom of the cavity or on a lower surface of the membrane at the top of the cavity and extending, in top view, on the most part of the surface of the cavity (105), wherein the dielectric coating (104) is structured opposite the cavity (105).
IPC结构图谱:
| B | 作业；运输 |
| --B06 | 一般机械振动的发生或传递 |
| ----B06B | 一般的机械振动的发生或传递 |
| ------B06B1/00 | 产生亚声频、声频或超声频的机械振动的过程或设备 |
| --------B06B1/02 | .利用电能 |