发明申请
US20220094336A1 TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH MULTIPLE DIAPHRAGM THICKNESSES AND FABRICATION METHOD
有权
基本信息:
- 专利标题： TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR WITH MULTIPLE DIAPHRAGM THICKNESSES AND FABRICATION METHOD
- 申请号：US17542295 申请日：2021-12-03
- 公开(公告)号：US20220094336A1 公开(公告)日：2022-03-24
- 发明人： Chris O'Brien , Andrew Kay , Albert Cardona , Ventsislav Yantchev , Patrick Turner , Robert B. Hammond , Dylan Kelly
- 申请人： Resonant Inc.
- 申请人地址： US TX Austin
- 专利权人： Resonant Inc.
- 当前专利权人： Resonant Inc.
- 当前专利权人地址： US TX Austin
- 主分类号： H03H9/56
- IPC分类号： H03H9/56 ; H03H3/02 ; H03H3/04 ; H03H9/02 ; H03H9/17 ; H03H9/205 ; H03H9/54
摘要：
Methods of fabricating filter devices are disclosed. A back surface of a piezoelectric plate having a first thickness is attached to a substrate. The front surface of the piezoelectric plate is selectively etched to thin a portion of the piezoelectric plate from the first thickness to a second thickness less than the first thickness. Cavities are formed in the substrate such that portions of the piezoelectric plate form a plurality of diaphragms spanning respective cavities. A conductor pattern is formed on the front surface. The conductor pattern includes a first interdigital transducer (IDT) with interleaved fingers on a first diaphragm having the first thickness and a second IDT with interleaved fingers on a second diaphragm having the second thickness.
公开/授权文献:
IPC结构图谱:
| H | 电学 |
| --H03 | 基本电子电路 |
| ----H03H | 阻抗网络，例如谐振电路；谐振器 |
| ------H03H9/00 | 包括机电或电声元件的网络，如谐振电路 |
| --------H03H9/30 | .时延网络 |
| ----------H03H9/48 | ..所采用的耦合装置 |
| ------------H03H9/56 | ...单晶滤波器 |