
基本信息:
- 专利标题: PLATING APPARATUS AND PLATING METHOD
- 申请号:US17419036 申请日:2018-12-28
- 公开(公告)号:US20220081796A1 公开(公告)日:2022-03-17
- 发明人: Yinuo Jin , Hongchao Yang , Jian Wang , Hui Wang
- 申请人: ACM Research (Shanghai) Inc.
- 申请人地址: CN Shanghai
- 专利权人: ACM Research (Shanghai) Inc.
- 当前专利权人: ACM Research (Shanghai) Inc.
- 当前专利权人地址: CN Shanghai
- 国际申请: PCT/CN2018/124649 WO 20181228
- 主分类号: C25D5/18
- IPC分类号: C25D5/18 ; C25D17/00 ; C25D7/12
摘要:
A plating apparatus and plating methods for plating metal layers on a substrate. In an embodiment, a plating method comprises: step 1: immersing a substrate into plating solution of a plating chamber assembly including at least a first anode and a second anode (3001); step 2: turning on a first plating power supply applied on the first anode, setting the first plating power supply to output a power value P11 and continue with a period T11 (3002); step 3: when the period T11 ends, adjusting the first plating power supply applied on the first anode to output a power value P12 and continue with a period T12, at the same time, turning on a second plating power supply applied on the second anode, and setting the second plating power supply to output a power value P21 and continue with a period T21 (3003); and step 4: when the period T21 ends, adjusting the second plating power supply applied on the second anode to output a power value P22 and continue with a period T22; wherein step 2 to step 4 are performed periodically.
公开/授权文献:
- US11781235B2 Plating apparatus and plating method 公开/授权日:2023-10-10
IPC结构图谱:
C | 化学;冶金 |
--C25 | 电解或电泳工艺;其所用设备 |
----C25D | 覆层的电解或电泳生产工艺方法;电铸;工件的电解法接合;所用的装置 |
------C25D5/00 | 以工艺方法为特征的电镀;工件的预处理或后处理 |
--------C25D5/18 | .使用调制电流、脉冲电流或换向电流的电镀 |