发明申请
US20210123716A1 COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT MEASUREMENT
有权
基本信息:
- 专利标题： COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT MEASUREMENT
- 申请号：US16818050 申请日：2020-03-13
- 公开(公告)号：US20210123716A1 公开(公告)日：2021-04-29
- 发明人： Haifeng Huang , Rui-Fang Shi , Dan Wack , Robert Kestner
- 申请人： KLA CORPORATION
- 申请人地址： US CA Milpitas
- 专利权人： KLA CORPORATION
- 当前专利权人： KLA CORPORATION
- 当前专利权人地址： US CA Milpitas
- 主分类号： G01B9/02
- IPC分类号： G01B9/02 ; G01M11/02 ; G01B11/255
摘要：
Reference and test waves are directed in a common path mode in a fiber tip diffraction interferometer. A first fiber can be used to generate the reference wave and a second fiber can be used to generate the test wave. Each fiber can include a single mode fiber tip that defines a wedge at an end without a coating on end surface or a tapered fiber tip. The fiber tip diffraction interferometer can include an aplanatic pupil imaging lens or system disposed to receive both the test wave and the reference wave and a sensor configured to receive both the test wave and the reference wave.
公开/授权文献:
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B9/00 | 组中所列的及以采用光学测量方法为其特征的仪器 |
| --------G01B9/02 | .干涉仪 |