基本信息:
- 专利标题： HOT SPOT DEFECT DETECTING METHOD AND HOT SPOT DEFECT DETECTING SYSTEM
- 申请号：US17121760 申请日：2020-12-15
- 公开(公告)号：US20210118125A1 公开(公告)日：2021-04-22
- 发明人： Chien-Huei Chen , Pei-Chao Su , Xiaomeng Chen , Chan-Ming Chang , Shih-Yung Chen , Hung-Yi Chung , Kuang-Shing Chen , Li-Jou Lee , Yung-Cheng Lin , Wei-Chen Wu , Shih-Chang Wang , Chien-An Lin
- 申请人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 申请人地址： TW Hsinchu
- 专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人： Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址： TW Hsinchu
- 主分类号： G06T7/00
- IPC分类号： G06T7/00 ; G06N3/08 ; G06N3/04 ; G01N21/95 ; G01N21/88
摘要：
A hot spot defect detecting method and a hot spot defect detecting system are provided. In the method, hot spots are extracted from a design of a semiconductor product to define a hot spot map comprising hot spot groups, wherein local patterns in a same context of the design yielding a same image content are defined as a same hot spot group. During runtime, defect images obtained by an inspection tool performing hot scans on a wafer manufactured with the design are acquired and the hot spot map is aligned to each defect image to locate the hot spot groups. The hot spot defects in each defect image are detected by dynamically mapping the hot spot groups located in each defect image to a plurality of threshold regions and respectively performing automatic thresholding on pixel values of the hot spots of each hot spot group in the corresponding threshold region.
公开/授权文献:
IPC结构图谱:
| G | 物理 |
| --G06 | 计算；推算；计数 |
| ----G06T | 一般的图像数据处理或产生 |
| ------G06T7/00 | 图像分析，例如从位像到非位像 |