![TESTING SYSTEM](/abs-image/US/2020/07/30/US20200240930A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: TESTING SYSTEM
- 申请号:US16748258 申请日:2020-01-21
- 公开(公告)号:US20200240930A1 公开(公告)日:2020-07-30
- 发明人: Keiji NOMARU , Taiki SAWABE
- 申请人: DISCO CORPORATION
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@276a6ab3
- 主分类号: G01N22/00
- IPC分类号: G01N22/00
摘要:
A testing system for testing a workpiece for a characteristic by irradiating microwaves to the workpiece and also irradiating a laser beam at an irradiation position of the microwaves, receiving microwaves reflected at the irradiation position where the workpiece has a reflectivity increased by carriers generated through photoexcitation, and measuring a lifetime of the carriers. The testing system includes a chuck table that holds the workpiece, a microwave irradiation unit that irradiates the microwaves to the workpiece held on the chuck table, a microwave reception unit that receives microwaves reflected by the workpiece, and a laser beam irradiation unit that irradiates the laser beam onto the irradiation position to which the microwaves have been irradiated.
公开/授权文献:
- US11137358B2 Testing system 公开/授权日:2021-10-05
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01N | 借助于测定材料的化学或物理性质来测试或分析材料 |
------G01N22/00 | 利用微波测试或分析材料 |