发明申请
US20200159129A1 Single Cell Grey Scatterometry Overlay Targets and Their Measurement Using Varying Illumination Parameter(s)
审中-公开
基本信息:
- 专利标题： Single Cell Grey Scatterometry Overlay Targets and Their Measurement Using Varying Illumination Parameter(s)
- 申请号：US16491963 申请日：2019-08-05
- 公开(公告)号：US20200159129A1 公开(公告)日：2020-05-21
- 发明人： Amnon Manassen , Yuri Paskover , Eran Amit
- 申请人： KLA-TENCOR CORPORATION
- 国际申请： PCT/US2019/045039 WO 20190805
- 主分类号： G03F7/20
- IPC分类号： G03F7/20 ; G01B11/27 ; G01B9/02
摘要：
Scatterometry overlay (SCOL) measurement methods, systems and targets are provided to enable efficient SCOL metrology with in-die targets. Methods comprise generating a signal matrix by: illuminating a SCOL target at multiple values of at least one illumination parameter, and at multiple spot locations on the target, wherein the illumination is at a NA (numerical aperture)>⅓ yielding a spot diameter