
基本信息:
- 专利标题: Transistor Component
- 申请号:US16393051 申请日:2019-04-24
- 公开(公告)号:US20190334000A1 公开(公告)日:2019-10-31
- 发明人: Markus Zundel , Karl-Heinz Bach , Peter Brandl , Franz Hirler , Andrew Christopher Graeme Wood
- 申请人: Infineon Technologies AG
- 优先权: DE102018109950.9 20180425
- 主分类号: H01L29/40
- IPC分类号: H01L29/40 ; H01L29/06 ; H01L29/10 ; H01L29/08 ; H01L29/423 ; H01L29/36 ; H01L29/78
摘要:
A transistor component includes at least one transistor cell having: a drift region, a source region, a body region and a drain region in a semiconductor body, the body region being arranged between the source and drift regions, and the drift region being arranged between the body and drain regions; a gate electrode arranged adjacent to the body region and dielectrically isolated from the body region by a gate dielectric; and a field electrode arranged adjacent to the drift region and dielectrically isolated from the drift region by a field electrode dielectric. The field electrode dielectric has a thickness that increases in a direction toward the drain region. The drift region has, in a mesa region adjacent to the field electrode, a doping concentration that increases in the direction toward the drain region.