基本信息:
- 专利标题： SHOCK CAGING FEATURES FOR MEMS ACTUATOR STRUCTURES
- 申请号：US16385486 申请日：2019-04-16
- 公开(公告)号：US20190308871A1 公开(公告)日：2019-10-10
- 发明人： Xiaolei Liu , Matthew Ng , Robert Calvet , Gerardo Morabito
- 申请人： MEMS Drive, Inc.
- 主分类号： B81B3/00
- IPC分类号： B81B3/00 ; B81B7/00 ; H02N1/00
摘要：
Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
公开/授权文献:
- US11104570B2 Shock caging features for MEMS actuator structures 公开/授权日：2021-08-31
IPC结构图谱:
| B | 作业；运输 |
| --B81 | 微观结构技术 |
| ----B81B | 微观结构的装置或系统，例如微观机械装置 |
| ------B81B3/00 | 由柔性或可变形的元件组成的装置，例如由弹性舌或膜片组成 |