
基本信息:
- 专利标题: ANGULAR VELOCITY SENSOR, ELECTRONIC APPARATUS, AND VEHICLE
- 申请号:US16285793 申请日:2019-02-26
- 公开(公告)号:US20190265266A1 公开(公告)日:2019-08-29
- 发明人: Kazuyuki NAGATA , Takayuki KIKUCHI
- 申请人: Seiko Epson Corporation
- 优先权: JP2018-032897 20180227
- 主分类号: G01P3/44
- IPC分类号: G01P3/44 ; G01C19/5649
摘要:
An angular velocity sensor includes a substrate, a detector including a movable detection electrode and a fixed detection electrode opposed to the movable detection electrode, and a driver adapted to drive the detector. The movable detection electrode is supported by a first spring that is elongated parallel to a Y axis from a first turned-back part, and a second spring that is elongated parallel to the Y axis from a second turned-back part. The first and second springs are fixed at first and second anchors. The first turned-back part is closer to the second spring than the first anchor. The detector includes a first surface opposed to the first spring, and a second surface disposed closer to the first spring than the first surface.
公开/授权文献:
- US11378584B2 Angular velocity sensor, electronic apparatus, and vehicle 公开/授权日:2022-07-05
IPC结构图谱:
G | 物理 |
--G01 | 测量;测试 |
----G01P | 线速度或角速度、加速度、减速度或冲击的测量;运动的存在、不存在或方向的指示 |
------G01P3/00 | 线速度或角速度的测量;线速度或角速度差值的测量 |
--------G01P3/02 | .以应用机械方法为特征的装置 |
----------G01P3/44 | ..用于角速度的测量 |