基本信息:
- 专利标题： LOAD LOCK SYSTEM FOR CHARGED PARTICLE BEAM IMAGING
- 申请号：US16241910 申请日：2019-01-07
- 公开(公告)号：US20190214225A1 公开(公告)日：2019-07-11
- 发明人： Hsuan-Bin HUANG , Chun-Liang LU , Chin-Fa TU , Wen-Sheng LIN , Youjin WANG
- 申请人： Hermes Microvision, Inc.
- 主分类号： H01J37/26
- IPC分类号： H01J37/26 ; H01J37/18 ; H01J37/28 ; H01J37/20 ; G01B11/00
摘要：
A load lock system for charged particle beam imaging with a particle shielding plate, a bottom seal plate and a plurality of sensor units is provided. The sensor units are located above the wafer, the shield plate is designed to have a few number of screws, and the bottom seal plate contains no cable, no contact sensors and fewer screws used. In the invention, the system is designed to improve the contamination particles from components in the load lock system of charged particle beam inspection tool and also to simplify its assembly.
公开/授权文献:
- US10643818B2 Load lock system for charged particle beam imaging 公开/授权日：2020-05-05
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/26 | .电子或离子显微镜；电子或离子衍射管 |