发明申请
US20190185991A1 METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY AND ARTICLES PRODUCED THEREBY
审中-公开
基本信息:
- 专利标题： METHOD FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY AND ARTICLES PRODUCED THEREBY
- 申请号：US16273037 申请日：2019-02-11
- 公开(公告)号：US20190185991A1 公开(公告)日：2019-06-20
- 发明人： Sean R. Kirkpatrick , Allen R. Kirkpatrick , Michael J. Walsh
- 申请人： Exogenesis Corporation
- 主分类号： C23C14/58
- IPC分类号： C23C14/58 ; H01J37/05 ; G02B1/12 ; G02B1/02 ; H01J37/32 ; H01J37/317
摘要：
A method for Neutral Beam irradiation derived from gas cluster ion beams and articles produced thereby including optical elements.