![LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD](/abs-image/US/2018/11/29/US20180339365A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
- 申请号:US15988930 申请日:2018-05-24
- 公开(公告)号:US20180339365A1 公开(公告)日:2018-11-29
- 发明人: Takashi Sampei , Yukiyasu Masuda
- 申请人: DISCO CORPORATION
- 优先权: JP2017-104335 20170526
- 主分类号: B23K26/08
- IPC分类号: B23K26/08 ; H01L21/77
摘要:
A laser processing apparatus includes a laser oscillator configured to oscillate a laser beam, a first condenser configured to focus an S-polarized laser beam, a second condenser configured to focus a P-polarized laser beam, an X-moving unit configured to processing-feed a holding table that holds a wafer thereon in X directions, and first and second indexing feed units configured to indexing-feed the first and second condensers respectively in Y directions. While the wafer is being processed with the laser beam from the first condenser along a projected dicing line on the wafer in the X directions, the second condenser is indexing-fed and positioned on a next projected dicing line along which to process the wafer.
公开/授权文献:
- US10406631B2 Laser processing apparatus and laser processing method 公开/授权日:2019-09-10
IPC结构图谱:
B | 作业;运输 |
--B23 | 机床;不包含在其他类目中的金属加工 |
----B23K | 钎焊或脱焊;焊接;用钎焊或焊接方法包覆或镀敷;局部加热切割,如火焰切割;用激光束加工 |
------B23K26/00 | 用激光束加工,例如焊接,切割,打孔 |
--------B23K26/08 | .激光束与工件具有相对运动的装置 |