基本信息:
- 专利标题： COMPACT DEFLECTING MAGNET
- 申请号：US15625921 申请日：2017-06-16
- 公开(公告)号：US20180315578A1 公开(公告)日：2018-11-01
- 发明人： Roy E. RAND , Vitaliy ZISKIN
- 申请人： IMATREX, INC.
- 主分类号： H01J37/147
- IPC分类号： H01J37/147 ; H01J37/153 ; H01J37/08
摘要：
A particle beam device including a magnet, the device including: a particle beam source configured to emit electron and ion beams; a plurality of yokes arranged in a substantially rectangular shape; a coil set including a plurality of coils, wherein windings of the plurality of coils are uniformly distributed across and wound around the plurality of yokes, wherein the coil set is configured to produce both dipole and quadrupole fields, wherein the magnet is configured to deflect and focus electron and ion beams.
公开/授权文献:
- US10290463B2 Compact deflecting magnet 公开/授权日：2019-05-14
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/02 | .零部件 |
| ----------H01J37/04 | ..电极装置及与产生或控制放电的部件有关的装置，如电子光学装置，离子光学装置 |
| ------------H01J37/147 | ...沿所需路径导引或偏转电子流的装置 |