发明申请
US20180211815A1 HIGH-VOLTAGE SUPPLY UNIT AND CIRCUIT ARRANGEMENT FOR GENERATING A HIGH VOLTAGE FOR A PARTICLE BEAM APPARATUS
审中-公开

基本信息:
- 专利标题: HIGH-VOLTAGE SUPPLY UNIT AND CIRCUIT ARRANGEMENT FOR GENERATING A HIGH VOLTAGE FOR A PARTICLE BEAM APPARATUS
- 申请号:US15924836 申请日:2018-03-19
- 公开(公告)号:US20180211815A1 公开(公告)日:2018-07-26
- 发明人: Edgar Fichter , Joerg Fober , Dirk Preikszas , Christian Hendrich , Michael Schnell , Momme Mommsen
- 申请人: Carl Zeiss Microscopy GmbH
- 优先权: DE102015207484.6 20150423
- 主分类号: H01J37/24
- IPC分类号: H01J37/24 ; H01J37/28
摘要:
The system described herein relates to a high-voltage supply unit for providing an output voltage for a particle beam apparatus, wherein the particle beam apparatus is embodied as, for example, an electron beam apparatus and/or an ion beam apparatus. The system described herein is based on the fact that it was recognized that a bipolar voltage supply unit can be formed by means of a unipolar first current source and a unipolar second current source, said bipolar voltage supply unit enabling a load current in two directions. The high-voltage supply unit according to the system described herein can be operated in the 4-quadrant operation. In the 4-quadrant operation, a first voltage source for supplying the first current source and a second voltage source for supplying the second current source are embodied as different voltage sources.