基本信息:
- 专利标题： COMPENSATED LOCATION SPECIFIC PROCESSING APPARATUS AND METHOD
- 申请号：US15863732 申请日：2018-01-05
- 公开(公告)号：US20180197715A1 公开(公告)日：2018-07-12
- 发明人： Matthew C. Gwinn , Martin D. Tabat , Kenneth Regan , Allen J. Leith , Michael Graf
- 申请人： TEL Epion Inc.
- 主分类号： H01J37/304
- IPC分类号： H01J37/304 ; H01J37/20 ; H01J37/08 ; H01J37/147
摘要：
An apparatus and method for processing a workpiece with a beam is described. The apparatus includes a vacuum chamber having a beam-line for forming a particle beam and treating a workpiece with the particle beam, and a scanner for translating the workpiece through the particle beam. The apparatus further includes a scanner control circuit coupled to the scanner, and configured to control a scan property of the scanner, and a beam control circuit coupled to at least one beam-line component, and configured to control the beam flux of the particle beam according to a duty cycle for switching between at least two different states during processing.
公开/授权文献:
IPC结构图谱:
| H | 电学 |
| --H01 | 基本电气元件 |
| ----H01J | 放电管或放电灯 |
| ------H01J37/00 | 有把物质或材料引入使受到放电作用的结构的电子管,如为了对其检验或加工的 |
| --------H01J37/02 | .零部件 |
| ----------H01J37/304 | ..由来自物体的信息控制电子管的，如校正信号 |