
基本信息:
- 专利标题: TRANSISTOR AND MANUFACTURING METHOD THEREOF
- 申请号:US15628592 申请日:2017-06-20
- 公开(公告)号:US20180006129A1 公开(公告)日:2018-01-04
- 发明人: Su Xing , Hsueh-Wen Wang , Chien-Yu Ko , Yu-Cheng Tung , Jen-Yu Wang , Cheng-Tung Huang , Yu-Ming Lin
- 申请人: UNITED MICROELECTRONICS CORP.
- 优先权: TW105120712 20160630
- 主分类号: H01L29/51
- IPC分类号: H01L29/51 ; H01L29/66 ; H01L29/786
摘要:
A transistor includes a semiconductor channel layer, a gate structure, a gate insulation layer, an internal electrode, and a ferroelectric material layer. The gate structure is disposed on the semiconductor channel layer. The gate insulation layer is disposed between the gate structure and the semiconductor channel layer. The internal electrode is disposed between the gate insulation layer and the gate structure. The ferroelectric material layer is disposed between the internal electrode and the gate structure. A spacer is disposed on the semiconductor channel layer, and a trench surrounded by the spacer is formed above the semiconductor channel layer. The ferroelectric material layer is disposed in the trench, and the gate structure is at least partially disposed outside the trench. The ferroelectric material layer in the transistor of the present invention is used to enhance the electrical characteristics of the transistor.
公开/授权文献:
- US10056463B2 Transistor and manufacturing method thereof 公开/授权日:2018-08-21
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L29/00 | 专门适用于整流、放大、振荡或切换,并具有至少一个电位跃变势垒或表面势垒的半导体器件;具有至少一个电位跃变势垒或表面势垒,例如PN结耗尽层或载流子集结层的电容器或电阻器;半导体本体或其电极的零部件 |
--------H01L29/02 | .按其半导体本体的特征区分的 |
----------H01L29/41 | ..以其形状、相对尺寸或位置为特征的 |
------------H01L29/49 | ...金属绝缘体半导体电极 |
--------------H01L29/51 | ....与其相关的绝缘材料 |