![BONDING WIRE FOR SEMICONDUCTOR DEVICE](/abs-image/US/2017/11/09/US20170323864A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: BONDING WIRE FOR SEMICONDUCTOR DEVICE
- 申请号:US15107417 申请日:2015-06-05
- 公开(公告)号:US20170323864A1 公开(公告)日:2017-11-09
- 发明人: Daizo ODA , Motoki ETO , Takashi YAMADA , Teruo HAIBARA , Ryo OISHI , Tomohiro UNO , Tetsuya OYAMADA
- 申请人: NIPPON MICROMETAL CORPORATION , NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
- 优先权: JP2015-036342 20150226
- 国际申请: PCT/JP2015/066385 WO 20150605
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
There is provided a Cu bonding wire having a Pd coating layer on a surface thereof, that improves bonding reliability of a ball bonded part in a high-temperature and high-humidity environment and is suitable for on-vehicle devices.The bonding wire for a semiconductor device includes a Cu alloy core material and a Pd coating layer formed on a surface of the Cu alloy core material, and the bonding wire contains In of 0.011 to 1.2% by mass and has the Pd coating layer of a thickness of 0.015 to 0.150 μm. With this configuration, it is able to increase the bonding longevity of a ball bonded part in a high-temperature and high-humidity environment, and thus to improve the bonding reliability. When the Cu alloy core material contains one or more elements of Pt, Pd, Rh and Ni in an amount, for each element, of 0.05 to 1.2% by mass, it is able to increase the reliability of a ball bonded part in a high-temperature environment of 175° C. or more. When an Au skin layer is further formed on a surface of the Pd coating layer, wedge bondability improves.
公开/授权文献:
- US10032741B2 Bonding wire for semiconductor device 公开/授权日:2018-07-24
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |