基本信息:
- 专利标题： MEMS GRID FOR MANIPULATING STRUCTURAL PARAMETERS OF MEMS DEVICES
- 申请号：US15441887 申请日：2017-02-24
- 公开(公告)号：US20170320724A1 公开(公告)日：2017-11-09
- 发明人： Roman Gutierrez , Tony Tang , Xiaolei Liu , Guiqin Wang , Matthew NG
- 申请人： MEMS Drive, Inc.
- 主分类号： B81B7/00
- IPC分类号： B81B7/00 ; B81C1/00
摘要：
A system and method for manipulating the structural characteristics of a MEMS device include etching a plurality of holes into the surface of a MEMS device, wherein the plurality of holes comprise one or more geometric shapes determined to provide specific structural characteristics desired in the MEMS device.