基本信息:
- 专利标题： DOUBLE BALL-BAR MEASURING SYSTEM AND ERRORS COMPENSATION METHOD THEREOF
- 申请号：US15365898 申请日：2016-11-30
- 公开(公告)号：US20170153102A1 公开(公告)日：2017-06-01
- 发明人： Wei-Tai LEI
- 申请人： NATIONAL TSING HUA UNIVERSITY
- 优先权： TW104140229 20151201
- 主分类号： G01B5/00
- IPC分类号： G01B5/00 ; G01B5/14 ; G01B3/30
摘要：
A double ball-bar measuring system includes a calibration unit, at least two double ball-bars and a measuring module. Among the double ball-bars, at least one is a measuring double ball-bar and at least one is a reference double ball-bar. The measuring double ball-bar is installed on a measurement apparatus to measure or calibrate a target machine. The reference double ball-bar is disposed on the calibration unit to measure thermal errors. When the target machine is driven for measurement or calibration, the geometric and thermal errors of the measuring double ball-bar are compensated so that the measurement apparatus can achieve highly accurate measurement.
公开/授权文献:
IPC结构图谱:
| G | 物理 |
| --G01 | 测量；测试 |
| ----G01B | 长度、厚度或类似线性尺寸的计量；角度的计量；面积的计量；不规则的表面或轮廓的计量 |
| ------G01B5/00 | 以采用机械方法为特征的计量设备 |