![BONDING WIRE FOR SEMICONDUCTOR DEVICE](/abs-image/US/2017/04/27/US20170117244A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: BONDING WIRE FOR SEMICONDUCTOR DEVICE
- 申请号:US15107423 申请日:2015-09-18
- 公开(公告)号:US20170117244A1 公开(公告)日:2017-04-27
- 发明人: Takashi YAMADA , Daizo ODA , Teruo HAIBARA , Tomohiro UNO
- 申请人: NIPPON MICROMETAL CORPORATION , NIPPON STEEL & SUMIKIN MATERIALS CO., LTD.
- 优先权: JP2015-106368 20150526; JPPCT/JP2015/066392 20150605
- 国际申请: PCT/JP2015/076721 WO 20150918
- 主分类号: H01L23/00
- IPC分类号: H01L23/00
摘要:
A bonding wire for a semiconductor device includes a Cu alloy core material and a Pd coating layer formed on a surface thereof, and the boding wire contains one or more elements of As, Te, Sn, Sb, Bi and Se in a total amount of 0.1 to 100 ppm by mass. The bonding longevity of a ball bonded part can increase in a high-temperature and high-humidity environment, improving the bonding reliability. When the Cu alloy core material further contains one or more of Ni, Zn, Rh, In, Ir, Pt, Ga and Ge in an amount, for each, of 0.011 to 1.2% by mass, it is able to increase the reliability of a ball bonded part in a high-temperature environment of 170° C. or more. When an alloy skin layer containing Au and Pd is further formed on a surface of the Pd coating layer, wedge bondability improves.
公开/授权文献:
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L23/00 | 半导体或其他固态器件的零部件 |