![PROJECTION EXPOSURE APPARATUS INCLUDING AT LEAST ONE MIRROR](/abs-image/US/2017/04/27/US20170115576A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: PROJECTION EXPOSURE APPARATUS INCLUDING AT LEAST ONE MIRROR
- 申请号:US15298323 申请日:2016-10-20
- 公开(公告)号:US20170115576A1 公开(公告)日:2017-04-27
- 发明人: Boris Bittner , Norbert Wabra , Sonja Schneider , Ricarda Schoemer , Stefan Rist
- 申请人: Carl Zeiss SMT GmbH
- 优先权: DE102015220537.1 20151021
- 主分类号: G03F7/20
- IPC分类号: G03F7/20
摘要:
A microlithographic projection exposure apparatus includes: a projection lens for imaging mask structures via an exposure radiation including at least one optical element and at least one manipulator; a read-in device for reading in application-specific structure information defining at least one property of an angular distribution of the exposure radiation upon entering the projection lens; and a travel establishing device for establishing a travel command defining a change to be made in an optical effect of the at least one optical element by manipulation of a property of the optical element via the at least one manipulator along a travel. The travel establishing device is configured to establish the travel command in an at least two-stage optimization.
公开/授权文献:
- US09910364B2 Projection exposure apparatus including at least one mirror 公开/授权日:2018-03-06