基本信息:
- 专利标题： FILAMENT HOLDER FOR HOT CATHODE PECVD SOURCE
- 专利标题（中）：用于热阴极PECVD源的FILAMENT HOLDER
- 申请号：US14939659 申请日：2015-11-12
- 公开(公告)号：US20160163517A1 公开(公告)日：2016-06-09
- 发明人： Samuel Lewis Tanaka , Christopher L. Platt , Thomas Larson Greenberg
- 申请人： Seagate Technology LLC
- 主分类号： H01J37/32
- IPC分类号： H01J37/32 ; H01K1/18
摘要：
A chemical vapor deposition source that includes at least one plate to which first and second electrical connection posts are coupled. The chemical vapor deposition source also includes a filament having a first end and a second end. The first end of the filament is electrically connected to the first electrical connection post and the second end of the filament is electrically connected to the second electrical connection post. The chemical vapor deposition source further includes at least one filament holder electrically insulated from the at least one plate. The at least one filament holder holds a portion of the filament between the first end and the second end.
摘要（中）：
化学气相沉积源，其包括至少一个板，第一和第二电连接柱与所述至少一个板连接。 化学气相沉积源还包括具有第一端和第二端的细丝。 灯丝的第一端电连接到第一电连接柱，灯丝的第二端电连接到第二电连接柱。 化学气相沉积源还包括与至少一个板电绝缘的至少一个灯丝架。 所述至少一个灯丝保持器将所述灯丝的一部分保持在所述第一端和所述第二端之间。
公开/授权文献:
- US09991099B2 Filament holder for hot cathode PECVD source 公开/授权日：2018-06-05