发明申请
US20160145137A1 METHOD FOR LOADING A BLANK COMPOSED OF FUSED SILICA WITH HYDROGEN, LENS ELEMENT AND PROJECTION LENS
审中-公开
基本信息:
- 专利标题： METHOD FOR LOADING A BLANK COMPOSED OF FUSED SILICA WITH HYDROGEN, LENS ELEMENT AND PROJECTION LENS
- 专利标题（中）：用氢气，透镜元件和投影镜头加载熔融二氧化硅的空白的方法
- 申请号：US15013499 申请日：2016-02-02
- 公开(公告)号：US20160145137A1 公开(公告)日：2016-05-26
- 发明人： Eric EVA
- 申请人： Carl Zeiss SMT GmbH
- 优先权： DE102013215292.2 20130802
- 主分类号： C03B19/06
- IPC分类号： C03B19/06 ; G02B13/14 ; C03B19/09 ; G02B13/16
摘要：
A method for loading a blank composed of fused silica with hydrogen, including loading the blank at a first temperature (T1) and a first hydrogen partial pressure (p1), and further loading the blank at a second temperature (T2) which is different from the first temperature and at a second hydrogen partial pressure (p2) which is different from the first hydrogen partial pressure. The first and second temperatures (T1, T2) are lower than a limit temperature (TL) at which a thermal formation of silane in the fused silica of the blank commences. Also disclosed are a lens element produced from such a blank and a projection lens that includes at least one such lens element.
摘要（中）：
一种用氢气填充由熔融二氧化硅组成的坯料的方法，包括在第一温度（T1）和第一氢分压（p1）下装载坯料，并且在与第二温度（T2）不同的第二温度（T2）下进一步加载坯料 第一温度和与第一氢分压不同的第二氢分压（p2）。 第一和第二温度（T1，T2）低于开始熔融石英中的硅烷的热形成的极限温度（TL）。 还公开了由这种坯件和包括至少一个这种透镜元件的投影透镜产生的透镜元件。