发明申请
US20160020064A1 Apparatus for focusing and for storage of ions and for separation of pressure areas
审中-公开
基本信息:
- 专利标题： Apparatus for focusing and for storage of ions and for separation of pressure areas
- 专利标题（中）：用于聚焦和存储离子和分离压力区域的装置
- 申请号：US14803342 申请日：2015-07-20
- 公开(公告)号：US20160020064A1 公开(公告)日：2016-01-21
- 发明人： Alexander Laue , Albrecht Glasmachers , Christian Hendrich , Dirk Preikszas , Michel Aliman , Hubert Mantz , Ulrike Zeile , Holger Doemer
- 申请人： Carl Zeiss Microscopy GmbH
- 主分类号： H01J37/18
- IPC分类号： H01J37/18 ; H01J37/20 ; H01J37/28
摘要：
An apparatus for focusing and for storage of ions and an apparatus for separation of a first pressure area from a second pressure area are disclosed, in particular for an analysis apparatus for ions. A particle beam device may have at least one of the abovementioned apparatuses. A container for holding ions and at least one multipole unit are provided. The multipole unit has a through-opening with a longitudinal axis as well as a multiplicity of electrodes. A first set of the electrodes is at a first radial distance from the longitudinal axis. A second set of the electrodes is in each case at a second radial distance from the longitudinal axis. The first radial distance is less than the second radial distance. Alternatively or additionally, the apparatus may have an elongated opening with a radial extent. The opening has a longitudinal extent which is greater than the radial extent.
摘要（中）：
公开了一种用于聚焦和存储离子的装置和用于将第一压力区域与第二压力区域分离的装置，特别是用于离子分析装置。 粒子束装置可以具有上述装置中的至少一个。 提供了用于保持离子和至少一个多极单元的容器。 多极单元具有纵向轴线的通孔以及多个电极。 第一组电极处于距纵向轴线的第一径向距离处。 在每种情况下，第二组电极距离纵向轴线的第二径向距离。 第一径向距离小于第二径向距离。 或者或另外，该装置可以具有径向范围的细长开口。 开口具有大于径向范围的纵向范围。