基本信息:
- 专利标题： VERTICAL CAVITY SURFACE EMITTING LASER AND ATOMIC OSCILLATOR
- 专利标题（中）：垂直孔表面发射激光和原子振荡器
- 申请号：US14575071 申请日：2014-12-18
- 公开(公告)号：US20150180211A1 公开(公告)日：2015-06-25
- 发明人： Yasutaka IMAI
- 申请人： Seiko Epson Corporation
- 优先权： JP2013-263461 20131220
- 主分类号： H01S5/42
- IPC分类号： H01S5/42
摘要：
A vertical cavity surface emitting laser includes: a substrate; and a laminated body which is provided over the substrate, wherein the laminated body includes a first mirror layer, an active layer, and a second mirror layer, in a plan view, the laminated body includes a first distortion imparting portion, a second distortion imparting portion, and a resonance portion which is provided between the first distortion imparting portion and the second distortion imparting portion and resonates light generated by the active layer, and an angle formed by a side surface of the first distortion imparting portion and an upper surface of the substrate, and an angle formed by a side surface of the second distortion imparting portion and the upper surface of the substrate are greater than an angle formed by a side surface of the resonance portion and the upper surface of the substrate.
摘要（中）：
垂直腔表面发射激光器包括：衬底; 以及设置在所述基板上的层叠体，其中，所述层叠体包括第一镜面层，有源层和第二镜面层，在俯视图中，所述层叠体包括第一变形赋予部，第二变形赋予 所述谐振部分设置在所述第一变形赋予部分和所述第二变形赋予部分之间并且谐振由所述有源层产生的光，并且由所述第一变形赋予部分的侧表面和所述第一变形赋予部分的上表面形成的角度 基板，并且由第二变形赋予部分的侧表面和基板的上表面形成的角度大于由共振部分的侧表面和基板的上表面形成的角度。