
基本信息:
- 专利标题: SEMICONDUCTOR COMPONENT WITH DYNAMIC BEHAVIOR
- 申请号:US14514491 申请日:2014-10-15
- 公开(公告)号:US20150028416A1 公开(公告)日:2015-01-29
- 发明人: Markus Zundel , Franz Hirler
- 申请人: Infineon Technologies AG
- 优先权: DE102007037858.2 20070810
- 主分类号: H01L29/40
- IPC分类号: H01L29/40 ; H01L29/423 ; H01L29/78
摘要:
One embodiment provides a semiconductor component including a semiconductor body having a first side and a second side and a drift zone; a first semiconductor zone doped complementarily to the drift zone and adjacent to the drift zone in a direction of the first side; a second semiconductor zone of the same conduction type as the drift zone adjacent to the drift zone in a direction of the second side; at least two trenches arranged in the semiconductor body and extending into the semiconductor body and arranged at a distance from one another; and a field electrode arranged in the at least two trenches adjacent to the drift zone. The at least two trenches are arranged at a distance from the second semiconductor zone in the vertical direction, a distance between the trenches and the second semiconductor zone is greater than 1.5 times the mutual distance between the trenches, and a doping concentration of the drift zone in a section between the trenches and the second semiconductor zone differs by at most 35% from a minimum doping concentration in a section between the trenches.
公开/授权文献:
- US09257512B2 Semiconductor component with dynamic behavior 公开/授权日:2016-02-09