发明申请
US20140374585A1 ION GROUP IRRADIATION DEVICE, SECONDARY ION MASS SPECTROMETER, AND SECONDARY ION MASS SPECTROMETRY METHOD
审中-公开
基本信息:
- 专利标题： ION GROUP IRRADIATION DEVICE, SECONDARY ION MASS SPECTROMETER, AND SECONDARY ION MASS SPECTROMETRY METHOD
- 专利标题（中）：离子组辐射装置，二次离子质谱仪和二次离子质谱方法
- 申请号：US14296973 申请日：2014-06-05
- 公开(公告)号：US20140374585A1 公开(公告)日：2014-12-25
- 发明人： Yohei Murayama , Masafumi Kyogaku , Kota Iwasaki , Naofumi Aoki
- 申请人： CANON KABUSHIKI KAISHA
- 优先权： JP2013-131783 20130624
- 主分类号： H01J49/14
- IPC分类号： H01J49/14 ; H01J49/00 ; H01J49/44
摘要：
The present invention provides an ion group irradiation device for irradiating a sample with an ion group, comprising: an ion group selecting unit configured to select, from ions released from an ion source, at least two ion groups formed of ions having different average masses; and a primary ion irradiation unit configured to irradiate the sample with the at least two ion groups selected by the ion group selecting unit, wherein the ion group selecting unit selects at least one ion group and further selects the at least two ion groups from each of the selected at least one ion group.
摘要（中）：
本发明提供了一种用于对离子基团照射样品的离子组照射装置，包括：离子组选择单元，被配置为从离子源释放的离子中选择由具有不同平均质量的离子形成的至少两个离子基; 以及初级离子照射单元，被配置为用所述离子群选择单元选择的所述至少两个离子群照射所述样品，其中所述离子选择单元选择至少一个离子基团，并且还从所述离子组中选择所述至少两个离子基团 所选择的至少一个离子基团。