基本信息:
- 专利标题： CAPACITIVE ELECTROMECHANICAL TRANSDUCER
- 专利标题（中）：电容式电磁传感器
- 申请号：US13983287 申请日：2012-01-16
- 公开(公告)号：US20130313663A1 公开(公告)日：2013-11-28
- 发明人： Ayako Kato , Kazutoshi Torashima , Yasuhiro Soeda , Shinichiro Watanabe
- 申请人： Ayako Kato , Kazutoshi Torashima , Yasuhiro Soeda , Shinichiro Watanabe
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP2011-027965 20110211
- 国际申请： PCT/JP2012/051281 WO 20120116
- 主分类号： H01L29/84
- IPC分类号： H01L29/84
摘要：
Provided is a capacitive electromechanical transducer manufactured by fusion bonding, which is capable of enhancing the performance by reducing fluctuations in initial deformation among diaphragms caused at positions having difference boundary conditions such as the bonding area. The capacitive electromechanical transducer includes a device, the device including at least one cellular structure including: a silicon substrate; a diaphragm; and a diaphragm supporting portion configured to support the diaphragm so that a gap is formed between one surface of the silicon substrate and the diaphragm. The device has, in its periphery, a groove formed in a layer shared with the diaphragm supporting portion.
摘要（中）：
提供一种通过熔接制造的电容式机电换能器，其能够通过减少在诸如接合面积的不同边界条件的位置处引起的膜片之间的初始变形的波动来提高性能。 电容式机电换能器包括一个装置，该装置包括至少一个蜂窝结构，包括：硅衬底; 隔膜 以及隔膜支撑部，其构造成支撑所述隔膜，使得在所述硅基板的一个表面和所述隔膜之间形成间隙。 该装置在其周边具有形成在与隔膜支撑部分共享的层中的凹槽。