
基本信息:
- 专利标题: Semiconductor Structure and Method for Manufacturing the Same
- 专利标题(中):半导体结构及其制造方法
- 申请号:US13504935 申请日:2011-11-30
- 公开(公告)号:US20130056829A1 公开(公告)日:2013-03-07
- 发明人: Huilong Zhu , Haizhou Yin , Zhijiong Luo
- 申请人: Huilong Zhu , Haizhou Yin , Zhijiong Luo
- 优先权: CN201110263440.2 20110907
- 国际申请: PCT/CN2011/002003 WO 20111130
- 主分类号: H01L27/092
- IPC分类号: H01L27/092 ; H01L21/02
摘要:
The present invention relates to a semiconductor structure and a method for manufacturing the same. A semiconductor structure comprises: a semiconductor substrate; a first insulating material layer, a first conductive material layer, a second insulating material layer, a second conductive material layer and an insulating buried layer formed in sequence on the semiconductor substrate; a semiconductor layer bonded on the insulating buried layer; transistors formed on the semiconductor layer, the channel regions of the transistors each being formed in the semiconductor layer and each having a back-gate formed from the second conductive material layer; a dielectric layer covering the semiconductor layer and the transistors; isolation structures for at least electrically isolating each transistor from its adjacent transistors, the top of the isolation structures being flush with or slightly higher than the upper surface of the semiconductor layer, and the bottom of the isolation structures being in the second insulating material layer; and a conductive contact running through the dielectric layer and extending down into the first conductive material layer.
摘要(中):
半导体结构及其制造方法技术领域本发明涉及半导体结构及其制造方法。 半导体结构包括:半导体衬底; 在半导体衬底上依次形成第一绝缘材料层,第一导电材料层,第二绝缘材料层,第二导电材料层和绝缘掩埋层; 接合在绝缘掩埋层上的半导体层; 形成在半导体层上的晶体管,晶体管的沟道区各自形成在半导体层中,每一个具有由第二导电材料层形成的背栅; 覆盖半导体层和晶体管的电介质层; 用于至少将每个晶体管与其相邻晶体管电隔离的隔离结构,隔离结构的顶部与半导体层的上表面齐平或略高,隔离结构的底部位于第二绝缘材料层中; 以及导电接触件,其穿过介电层并向下延伸到第一导电材料层中。
公开/授权文献:
IPC结构图谱:
H | 电学 |
--H01 | 基本电气元件 |
----H01L | 半导体器件;其他类目未包含的电固体器件 |
------H01L27/00 | 由在一个共用衬底内或其上形成的多个半导体或其他固态组件组成的器件 |
--------H01L27/02 | .包括有专门适用于整流、振荡、放大或切换的半导体组件并且至少有一个电位跃变势垒或者表面势垒的;包括至少有一个跃变势垒或者表面势垒的无源集成电路单元的 |
----------H01L27/04 | ..其衬底为半导体的 |
------------H01L27/06 | ...在非重复结构中包括有多个单个组件的 |
--------------H01L27/085 | ....只包含场效应的组件 |
----------------H01L27/088 | .....有绝缘栅场效应晶体管的组件 |
------------------H01L27/092 | ......互补MIS场效应晶体管 |