发明申请
US20120326570A1 FLEXURAL VIBRATOR ELEMENT, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING FLEXURAL VIBRATOR ELEMENT
有权
基本信息:
- 专利标题： FLEXURAL VIBRATOR ELEMENT, ELECTRONIC DEVICE, AND METHOD OF MANUFACTURING FLEXURAL VIBRATOR ELEMENT
- 专利标题（中）：柔性振动元件，电子设备及制造柔性振动元件的方法
- 申请号：US13530615 申请日：2012-06-22
- 公开(公告)号：US20120326570A1 公开(公告)日：2012-12-27
- 发明人： Ryuta NISHIZAWA , Seiichiro OGURA , Takayuki KIKUCHI
- 申请人： Ryuta NISHIZAWA , Seiichiro OGURA , Takayuki KIKUCHI
- 申请人地址： JP Tokyo
- 专利权人： SEIKO EPSON CORPORATION
- 当前专利权人： SEIKO EPSON CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2011-140618 20110624
- 主分类号： H01L41/04
- IPC分类号： H01L41/04 ; H01L41/22 ; H01L41/047
摘要：
A flexural vibrator element has a vibrator arm extending from a base section and having a rectangular cross-sectional shape, the vibrator arm having first and second step sections composed of step surfaces intersecting respectively with a left side surface and a right side surface, and step side surfaces intersecting respectively with an upper surface and a lower surface, between the lower surface, the upper surface and the left side surface, the right side surface, and first and fourth detection electrodes on the left and right side surfaces and second and third detection electrodes on the step side surfaces are respectively separated in a thickness direction of the vibrator arm. The first through fourth detection electrodes are patterned with accuracy by exposure from the upper surface and the lower surface using a common exposure device by existing photo etching.
摘要（中）：
弯曲振动元件具有从基部延伸并具有矩形横截面形状的振动臂，所述振动臂具有由分别与左侧表面和右侧表面相交的台阶表面组成的第一和第二台阶部分，以及步骤 在下表面，上表面和左侧表面之间，右侧表面以及第一和第四检测电极在左侧表面和右侧表面上分别与上表面和下表面相交的侧表面，以及第二和第三检测 台阶侧表面上的电极分别在振动臂的厚度方向上分离。 通过利用现有的光蚀刻使用公共曝光装置从上表面和下表面曝光来精确地对第一至第四检测电极进行图案化。
公开/授权文献:
IPC结构图谱:
| H | 电学 |
| --H04 | 电通信技术 |
| ----H04R | 扬声器、送话器、唱机拾音器或类似的传感器 |
| ------H01L41/02 | .零部件 |
| --------H01L41/04 | ..压电器件的或电致伸缩器件的 |