![DEVICE FOR SINGLE-CRYSTAL GROWTH AND METHOD OF SINGLE-CRYSTAL GROWTH](/abs-image/US/2012/11/29/US20120298031A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: DEVICE FOR SINGLE-CRYSTAL GROWTH AND METHOD OF SINGLE-CRYSTAL GROWTH
- 专利标题(中):单晶生长装置和单晶生长方法
- 申请号:US13521524 申请日:2010-12-28
- 公开(公告)号:US20120298031A1 公开(公告)日:2012-11-29
- 发明人: Toshimitsu Ito , Yasuhide Tomioka , Yuji Yanagisawa , Isamu Shindo , Atsushi Yanase
- 申请人: Toshimitsu Ito , Yasuhide Tomioka , Yuji Yanagisawa , Isamu Shindo , Atsushi Yanase
- 申请人地址: JP Yamanashi JP Tokyo
- 专利权人: CRYSTAL SYSTEMS CORPORATION,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- 当前专利权人: CRYSTAL SYSTEMS CORPORATION,NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- 当前专利权人地址: JP Yamanashi JP Tokyo
- 优先权: JP2010-006894 20100115
- 国际申请: PCT/JP2010/073699 WO 20101228
- 主分类号: C30B13/24
- IPC分类号: C30B13/24
摘要:
[Technical Problem]It is an object to provide a device for a single-crystal growth and a method of a single-crystal growth in which even when materials that are different in, for example, a melting point or a diameter are to be grown, the conditions for the stable growth of a single crystal can be obtained and a high-quality single crystal having a desired diameter can hence be grown. In addition, the device and the method have a reduced fluctuation of heating intensity to facilitate a crystal growth.[Solution of Problem]A device for a single-crystal growth is provided with a raw material rod (14) that is supported by an upper crystal driving shaft (8), a seed crystal rod (16) that is supported by a lower crystal driving shaft (12), and a heating means, and a contact part of the raw material rod (14) with the seed crystal rod (16) is heated with a heating means to form a melting zone (18) and grow a single crystal. The device is characterized in that the heating means is configured by a plurality of rectangular beams produced by lasers (2a, . . . 2e) which emit a laser light having the equivalent irradiation intensity and by an optical means, the heating means being disposed in a circumferential direction of the melting zone (18).
摘要(中):
技术问题本发明的目的是提供一种单晶生长装置和单晶生长方法,其中即使在例如熔点或直径不同的材料生长时 ,可以获得单晶稳定生长的条件,因此可以生长具有期望直径的高质量单晶。 此外,该装置和方法具有降低的加热强度波动以促进晶体生长。 问题的解决方案用于单晶生长的装置设置有由上晶体驱动轴(8)支撑的原料棒(14),由下晶体支撑的晶种棒(16) 驱动轴(12)和加热装置,原料棒(14)与籽晶杆(16)的接触部分用加热装置加热以形成熔化区(18)并生长单晶 。 该装置的特征在于,加热装置由发射具有等效照射强度的激光的激光器(2a,...,2e)产生的多个矩形光束构成,并且通过光学装置,加热装置设置在 熔融区(18)的圆周方向。