发明申请
US20120100788A1 MANUFACTURING METHOD OF CARRIER FOR DOUBLE-SIDE POLISHING APPARATUS, CARRIER FOR DOUBLE-SIDE POLISHING APPARATUS, AND DOUBLE-SIDE POLISHING METHOD OF WAFER
有权
基本信息:
- 专利标题： MANUFACTURING METHOD OF CARRIER FOR DOUBLE-SIDE POLISHING APPARATUS, CARRIER FOR DOUBLE-SIDE POLISHING APPARATUS, AND DOUBLE-SIDE POLISHING METHOD OF WAFER
- 专利标题（中）：用于双面抛光装置的载体的制造方法，双面抛光装置的载体和双面抛光方法
- 申请号：US13379482 申请日：2010-06-18
- 公开(公告)号：US20120100788A1 公开(公告)日：2012-04-26
- 发明人： Taichi Yasuda , Tatsuo Enomoto
- 申请人： Taichi Yasuda , Tatsuo Enomoto
- 申请人地址： JP Tokyo
- 专利权人： SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人： SHIN-ETSU HANDOTAI CO., LTD.
- 当前专利权人地址： JP Tokyo
- 优先权： JP2009-170138 20090721
- 国际申请： PCT/JP2010/004077 WO 20100618
- 主分类号： B24B41/06
- IPC分类号： B24B41/06 ; B23P11/00
摘要：
A manufacturing method of a carrier for a double-side polishing apparatus for polishing surfaces of a wafer, the carrier having: a carrier body arranged between upper and lower turn tables, the carrier body having a holding hole for holding the wafer; and a ring-shaped resin insert arranged along an inner circumference of the holding hole, the resin insert having an inner circumferential surface to be brought into contact with a peripheral portion of the wafer to be held, the method having the steps of attaching, to the holding hole of the carrier body, a base material for the resin insert not having the inner circumferential surface to be brought into contact with the wafer to be held, and performing inner-circumferential-surface-forming processing on the base material for the resin insert to form the inner circumferential surface to be brought into contact with the peripheral portion of the wafer to be held.
摘要（中）：
一种用于抛光晶片表面的双面抛光装置的载体的制造方法，所述载体具有：设置在上下转台之间的载体，所述载体具有用于保持所述晶片的保持孔; 以及环形树脂插入件，其沿着保持孔的内周布置，所述树脂插入件具有与要保持的晶片的周边部分接触的内周面，该方法具有以下步骤： 承载体的保持孔，不具有与要保持的晶片接触的内周面的树脂插入件的基材，并且对于树脂的基材进行内周面形成处理 插入以形成与要保持的晶片的周边部分接触的内周面。
公开/授权文献:
IPC结构图谱:
| B | 作业；运输 |
| --B24 | 磨削；抛光 |
| ----B24B | 用于磨削或抛光的机床、装置或工艺；磨具磨损表面的修理或调节；磨削，抛光剂或研磨剂的进给 |
| ------B24B41/00 | 机架，床身，滑板，床头箱之类的部件 |
| --------B24B41/06 | .工件支架，如可调中心架 |