基本信息:
- 专利标题： CHARGED PARTICLE RADIATION DEVICE
- 专利标题（中）：充电颗粒辐射装置
- 申请号：US13147980 申请日：2010-01-20
- 公开(公告)号：US20110291010A1 公开(公告)日：2011-12-01
- 发明人： Junichi Katane , Sukehiro Ito
- 申请人： Junichi Katane , Sukehiro Ito
- 优先权： JP2009-025495 20090206
- 国际申请： PCT/JP2010/000279 WO 20100120
- 主分类号： H01J37/18
- IPC分类号： H01J37/18 ; H01J37/28
摘要：
The present invention provides a scanning charged particle beam device including a sample chamber (8) and a detector. The detector has: a function of detecting light at least ranging from the vacuum ultraviolet region to the visible light region, of light (17) having image information which is obtained by a light emission phenomenon of gas scintillation when the sample chamber is controlled to a low vacuum (1 Pa to 3,000 Pa); and a function of detecting ion currents (11, 13) having image information which are obtained by cascade amplification of electrons and gas molecules. Accordingly, it becomes possible to realize a device which can deal with observation of various samples. Further, an optimal configuration of the detection unit is devised, to thereby make it possible to add value to an obtained image and provide users in wide-ranging fields with the observation image. In addition, the detector is made usable in combination with a detector for high vacuum, to thereby make it possible to provide wide-ranging users with the image, irrespective of the vacuum mode.
摘要（中）：
本发明提供一种扫描带电粒子束装置，其包括样品室（8）和检测器。 检测器具有：检测至少从真空紫外区域到可见光区域的光的功能，具有通过气体闪烁的发光现象获得的图像信息的光（17），当样品室被控制到 低真空（1Pa〜3,000Pa）; 以及检测具有通过电子和气体分子的级联放大获得的图像信息的离子电流（11,13）的功能。 因此，可以实现可以处理各种样品的观察的装置。 此外，设计了检测单元的最佳配置，从而使得可以向所获得的图像增加值并且向用户提供具有观察图像的广泛范围的用户。 此外，检测器可与用于高真空的检测器组合使用，从而使得可以向广泛的用户提供图像，而不管真空模式如何。
公开/授权文献:
- US08294097B2 Charged particle radiation device 公开/授权日：2012-10-23