基本信息:
- 专利标题： CHARGED PARTICLE BEAM APPLICATION APPARATUS
- 专利标题（中）：充电颗粒光束应用设备
- 申请号：US12828781 申请日：2010-07-01
- 公开(公告)号：US20100264330A1 公开(公告)日：2010-10-21
- 发明人： Masaki MIZUOCHI , Shoji Tomida
- 申请人： Masaki MIZUOCHI , Shoji Tomida
- 申请人地址： JP Tokyo
- 专利权人： HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人： HITACHI HIGH-TECHNOLOGIES CORPORATION
- 当前专利权人地址： JP Tokyo
- 优先权： JP2007-156357 20070613
- 主分类号： H01J37/20
- IPC分类号： H01J37/20 ; H01J37/26 ; H01J37/30
摘要：
An apparatus capable of improving image quality by making it possible to suck specimens of different sizes electrostatically, and uniformalizing an electric field of a specimen edge portion, while suppressing increase in prime cost is provided. Specimen holding means is an electrostatic chuck, a master flat plane part surrounding a specimen of the largest size of specimen sizes, and an opening surrounding a specimen size except for the largest specimen size are included at an outer peripheral portion of the electrostatic chuck, a dummy specimen attachable to and detachable from the electrostatic chuck is included, and at a time of switching the specimen size, a dummy specimen is selected (or may be prevented from being used).
摘要（中）：
提供了一种能够通过静电吸取不同尺寸的试样来提高图像质量并且同时抑制原始成本增加的同时使试样边缘部分的电场均匀化的装置。 样本保持装置是静电卡盘，围绕最大尺寸样本尺寸的样本的主平面部分和围绕最大样本尺寸的样本尺寸的开口包括在静电卡盘的外周部分， 包含可静电卡盘可拆卸的虚拟试样，在切换试样尺寸的情况下，选择虚拟试样（或者可以防止使用）。
公开/授权文献:
- US08158955B2 Charged particle beam application apparatus 公开/授权日：2012-04-17