基本信息:
- 专利标题： MOUNTING TABLE STRUCTURE AND PROCESSING APPARATUS
- 专利标题（中）：安装台结构和加工设备
- 申请号：US12713226 申请日：2010-02-26
- 公开(公告)号：US20100163188A1 公开(公告)日：2010-07-01
- 发明人： Sumi Tanaka , Hiroo Kawasaki
- 申请人： Sumi Tanaka , Hiroo Kawasaki
- 申请人地址： JP Tokyo
- 专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Tokyo
- 优先权： JP2007-221525 20070828
- 主分类号： H01L21/683
- IPC分类号： H01L21/683 ; B23Q3/00 ; H01L21/3065 ; H01L21/205
摘要：
A mounting table structure 54, provided within a processing chamber 22 of a processing apparatus 20 so as to mount thereon a target object to be processed, includes a mounting table 58 made of a dielectric material and having a heating unit 64; and a cylindrical supporting column 56 which is extended upward from a bottom of the processing chamber and is made of a dielectric material and is configured to detachably support the mounting table 58. A cylindrical protection pipe 60 is fixed to a bottom surface of the mounting table 58 and is made of a dielectric material having a diameter smaller than a diameter of the supporting column. A functional rod member 62 is inserted through an inside of the protection pipe 60 and has an upper end in contact with the mounting table 58.
摘要（中）：
安装台结构54设置在处理装置20的处理室22内，以便安装在其上待处理目标物体上，包括由电介质材料制成并具有加热单元64的安装台58; 以及从处理室的底部向上延伸并由介电材料制成的圆柱形支撑柱56，并被构造成可拆卸地支撑安装台58.圆柱形保护管60固定到安装台的底面 并且由直径小于支撑柱的直径的电介质材料制成。 功能杆构件62穿过保护管60的内部插入，并且具有与安装台58接触的上端。
公开/授权文献:
- US1675637A Adapter and plug for cut-outs 公开/授权日：1928-07-03