
基本信息:
- 专利标题: COPOLYMER FOR IMMERSION LITHOGRAPHY AND COMPOSITIONS
- 专利标题(中):用于渗透层析和组合物的共聚物
- 申请号:US12445948 申请日:2007-10-30
- 公开(公告)号:US20100047710A1 公开(公告)日:2010-02-25
- 发明人: Takanori Yamagishi , Tomo Oikawa , Takayoshi Okada
- 申请人: Takanori Yamagishi , Tomo Oikawa , Takayoshi Okada
- 申请人地址: JP Chuo-ku
- 专利权人: Maruzen Petrochemical Co., Ltd
- 当前专利权人: Maruzen Petrochemical Co., Ltd
- 当前专利权人地址: JP Chuo-ku
- 优先权: JP2006-301462 20061107
- 国际申请: PCT/JP07/01183 WO 20071030
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; C08G63/08
摘要:
The present invention provides a copolymer which can prevent problems associated with immersion lithography (including occurrence of a pattern defect such as water mark, and variation in sensitivity or abnormal patterning due to elution of an additive such as a radiation-sensitive acid-generator) and which provides surface characteristics suitable for immersion lithography, and a composition containing the copolymer.The copolymer for immersion lithography has, at least, a repeating unit (A) that generates an alkali-soluble group by removing protecting group through action of an acid, and a repeating unit (B) having a lactone structure, wherein, when a solution of the copolymer in propylene glycol monomethyl ether acetate (hereinafter may be abbreviated as “PGMEA”) is applied to a wafer and then heated to form a thin film, and a 15-μL droplet of pure water is added onto the thin film, the inclination of the wafer at the time when the water droplet starts to move is 35° or less, or the contact angle of the top edge of the water droplet at the time when the water droplet starts to move is 64° or more.
摘要(中):
本发明提供一种共聚物,其能够防止与浸渍光刻相关的问题(包括图案缺陷如水痕的发生,以及由于诸如辐射敏感的酸发生剂等添加剂的洗脱引起的灵敏度或异常图案的变化) 其提供适于浸渍光刻的表面特性,以及含有该共聚物的组合物。 用于浸渍光刻的共聚物至少具有通过酸的作用除去保护基而产生碱溶性基团的重复单元(A)和具有内酯结构的重复单元(B),其中当溶液 的丙二醇单甲醚乙酸酯共聚物(以下简称为“PGMEA”)施加到晶片上,然后加热形成薄膜,在薄膜上加入15μL的纯水滴, 当水滴开始移动时,晶片的倾斜度为35°以下,或水滴开始移动时的水滴顶端的接触角为64°以上。
公开/授权文献:
- US08211615B2 Copolymer for immersion lithography and compositions 公开/授权日:2012-07-03