基本信息:
- 专利标题： Method for Cleaning a Workpiece With the Aid of Halogen Ions
- 专利标题（中）：用卤素离子清洗工件的方法
- 申请号：US11792658 申请日：2005-11-29
- 公开(公告)号：US20090223538A1 公开(公告)日：2009-09-10
- 发明人： Ursus Krüger , Uwe Pyritz , Heike Schiewe , Raymond Ullrich
- 申请人： Ursus Krüger , Uwe Pyritz , Heike Schiewe , Raymond Ullrich
- 优先权： DE102004061269.2 20041210
- 国际申请： PCT/EP05/56301 WO 20051129
- 主分类号： B08B6/00
- IPC分类号： B08B6/00 ; H01L21/306
摘要：
The invention relates to a method for cleaning turbine blades, for example, in a cleaning chamber into which a process gas containing especially fluoride ions is introduced. According to the inventive method, contaminated process gas is directed into an analysis chamber where a plasma is ignited and is analyzed using emission spectroscopy in order to monitor the process, particularly to determine the conditions for stopping the process. The spectrometric measurement can be evaluated in an evaluation unit, the cleaning process being stopped via signal line in case of a characteristic change of the spectrum. Also disclosed is a cleaning device comprising an analysis apparatus with a sample chamber and a plasma generator, an interface being provided for evaluating the result of the analysis.
摘要（中）：
本发明涉及一种用于清洁涡轮叶片的方法，例如在清洁室中，其中引入了特别是氟离子的工艺气体。 根据本发明的方法，污染的处理气体被引导到分析室中，其中等离子体被点燃，并且使用发射光谱法进行分析，以便监测该过程，特别是确定停止该过程的条件。 光谱测量可以在评估单元中进行评估，在光谱的特征变化的情况下，清洁过程通过信号线停止。 还公开了一种清洁装置，其包括具有样品室和等离子体发生器的分析装置，提供用于评估分析结果的界面。