基本信息:
- 专利标题： LIQUID-PHASE GROWTH APPARATUS AND METHOD
- 专利标题（中）：液相生长装置和方法
- 申请号：US12168464 申请日：2008-07-07
- 公开(公告)号：US20090000540A1 公开(公告)日：2009-01-01
- 发明人： Masaki MIZUTANI , Katsumi NAKAGAWA , Takehito YOSHINO , Shoji NISHIDA
- 申请人： Masaki MIZUTANI , Katsumi NAKAGAWA , Takehito YOSHINO , Shoji NISHIDA
- 申请人地址： JP Tokyo
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： JP Tokyo
- 优先权： JP095997/2002 20020329
- 主分类号： C30B19/06
- IPC分类号： C30B19/06
摘要：
A liquid-phase growth apparatus for growing a crystal on a substrate includes a crucible containing a solution that contains a raw material for forming the crystal, and a substrate holder for vertically holding the substrate. The substrate holder includes connectors, a receiving component, and a push component. The receiving component and the push component are opposite to each other and are connected by the connectors. The push component holds an upper portion of the substrate while the receiving component holds a lower portion of the substrate. The substrate holder containing the vertically held substrate is dipped into the solution. The receiving component ascends with buoyancy in the solution contained in the crucible, so that the substrate is now held securely and prevented from cracking due to thermal expansion.
摘要（中）：
用于在基板上生长晶体的液相生长装置包括含有包含用于形成晶体的原料的溶液的坩埚和用于垂直保持基板的基板保持器。 衬底保持器包括连接器，接收部件和推动部件。 接收部件和推动部件彼此相对并且通过连接器连接。 推动部件保持基板的上部，而接收部件保持基板的下部。 将含有垂直保持的基板的基板保持器浸入溶液中。 接收部件在包含在坩埚中的溶液中浮力上升，使得基板现在被牢固地保持并且防止由于热膨胀而开裂。
公开/授权文献:
- US07615115B2 Liquid-phase growth apparatus and method 公开/授权日：2009-11-10