![Solid-state imaging device and method for producing the same](/abs-image/US/2007/03/15/US20070057286A1/abs.jpg.150x150.jpg)
基本信息:
- 专利标题: Solid-state imaging device and method for producing the same
- 专利标题(中):固态成像装置及其制造方法
- 申请号:US11517487 申请日:2006-09-08
- 公开(公告)号:US20070057286A1 公开(公告)日:2007-03-15
- 发明人: Takanori Sato
- 申请人: Takanori Sato
- 专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人: FUJI PHOTO FILM CO., LTD.
- 优先权: JPP2005-263749 20050912
- 主分类号: H01L31/00
- IPC分类号: H01L31/00
摘要:
A method for producing a solid-state imaging device, which including: a photoelectric conversion section; a charge transfer section having a charge transfer electrode; and an antireflection film covering a light-receiving region in the photoelectric conversion section, wherein forming the antireflection film includes: forming a sidewall on a lateral wall of the charge transfer electrode after forming the charge transfer electrode; forming an antireflection film on a substrate surface where the sidewall is formed; forming a resist on the antireflection film; melting and flattening the resist to expose the antireflection film on the charge transfer electrode; removing the antireflection film by using the resist as the mask; removing the sidewall; covering the charge transfer electrode with an insulating film; and forming a light-shielding film that reaches a level lower than the top surface of the antireflection film, and that surrounds the periphery of the antireflection film.
摘要(中):
一种固态成像装置的制造方法,其特征在于,包括:光电转换部; 具有电荷转移电极的电荷转移部分; 以及覆盖所述光电转换部中的光接收区域的防反射膜,其中形成所述抗反射膜包括:在形成所述电荷转移电极之后,在所述电荷转移电极的侧壁上形成侧壁; 在形成侧壁的基板表面上形成抗反射膜; 在抗反射膜上形成抗蚀剂; 使抗蚀剂熔化并变平,使电荷转移电极上的抗反射膜露出; 通过使用抗蚀剂作为掩模去除抗反射膜; 去除侧壁; 用绝缘膜覆盖电荷转移电极; 并且形成达到比防反射膜的上表面低的水平并且包围防反射膜的周边的遮光膜。