基本信息:
- 专利标题： Acoustic wave etch rate sensor system
- 专利标题（中）：声波蚀刻率传感器系统
- 申请号：US11156012 申请日：2005-06-16
- 公开(公告)号：US20060283249A1 公开(公告)日：2006-12-21
- 发明人： James Liu , Michael Rhodes , Aziz Rahman
- 申请人： James Liu , Michael Rhodes , Aziz Rahman
- 专利权人： Honeywell International Inc.
- 当前专利权人： Honeywell International Inc.
- 主分类号： G01H13/00
- IPC分类号： G01H13/00
摘要：
An acoustic wave sensor system for monitoring the etch rate or etchability of a selective material has an acoustic wave sensing device having a piezoelectric substrate and at least one electrode coupled to the substrate for generating a propagating acoustic wave and for detecting changes in frequency or other propagation characteristics of the acoustic wave. A selective material is disposed on the substrate. Changes in propagation characteristics of the wave caused by etching of the selective material by an etchant can be analyzed to evaluate the etching rate or etchability of the selective material. The sensing system can have a wireless sensing device which device is mountable in an oil filter system for monitoring the corrosion of the engine. The sensing device can be configured as BAW, SH-SAW, SH-APM, FPM devices or other acoustic wave devices.
摘要（中）：
用于监测选择性材料的蚀刻速率或蚀刻性的声波传感器系统具有声波感测装置，其具有压电衬底和耦合到衬底的至少一个电极，用于产生传播声波并检测频率或其他传播的变化 声波的特点。 选择性材料设置在基板上。 可以分析通过蚀刻剂蚀刻选择性材料引起的波的传播特性的变化，以评价选择性材料的蚀刻速率或蚀刻性。 感测系统可以具有无线感测装置，该装置可安装在用于监测发动机腐蚀的机油滤清器系统中。 感测装置可以配置为BAW，SH-SAW，SH-APM，FPM装置或其他声波装置。
公开/授权文献:
- US07322243B2 Acoustic wave etch rate sensor system 公开/授权日：2008-01-29