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基本信息:
- 专利标题: Vacuum control system
- 专利标题(中):真空控制系统
- 申请号:US10813558 申请日:2004-03-29
- 公开(公告)号:US20050079074A1 公开(公告)日:2005-04-14
- 发明人: Yoshio Ishii , Koji Tanemura , Toshihiko Matsumoto , Kozo Shirato
- 申请人: Yoshio Ishii , Koji Tanemura , Toshihiko Matsumoto , Kozo Shirato
- 申请人地址: JP Saitama
- 专利权人: ERC, Inc.
- 当前专利权人: ERC, Inc.
- 当前专利权人地址: JP Saitama
- 优先权: JP2003-352286 20031010
- 主分类号: F04B49/06
- IPC分类号: F04B49/06 ; A61M1/00 ; B01D19/00 ; B01D61/00 ; F04B37/14 ; G05D16/04 ; G05D16/20 ; C21C7/10 ; F04B17/00
摘要:
There is provided a vacuum control system for allowing the degree of vacuum in a vacuum vessel to be kept constant, effectively and accurately removing vaporized components degassed into the vacuum vessel through a gas permeation diaphragm by stably introducing a very small amount of air into a vacuum exhaust path, and thus operating stably, and a vacuum degassing apparatus employing the vacuum control system. The vacuum control system controls the rotatory power of a DC brushless motor, continuously controls displacement of a vacuum pump, and thus keeps the degree of vacuum in a vacuum vessel constant, by decompressing the inside of the vacuum vessel using an exhaust vacuum pump which operates with the DC brushless motor, monitoring the inside pressure of the vacuum vessel using a pressure sensor, and controlling a voltage applied to the DC brushless motor on the basis of an output signal resulting from measurement of the inside pressure of the vacuum vessel by the pressure sensor.
摘要(中):
提供一种真空控制系统,用于通过将非常少量的空气稳定地引入真空中,通过气体渗透膜将真空容器中的真空度保持恒定,有效和准确地除去脱气到真空容器中的蒸发组分 排气路径,因此稳定地运行,以及采用真空控制系统的真空脱气装置。 真空控制系统控制直流无刷电动机的旋转动力,连续地控制真空泵的位移,从而通过使用操作的排气真空泵减压真空容器的内部来保持真空容器内的真空度恒定 使用直流无刷电动机,使用压力传感器监测真空容器的内部压力,并且基于通过压力测量真空容器的内部压力而产生的输出信号来控制施加到DC无刷电动机的电压 传感器。
公开/授权文献:
- US07686590B2 Vacuum control system 公开/授权日:2010-03-30
IPC结构图谱:
F | 机械工程;照明;加热;武器;爆破 |
--F04 | 液体变容式机械;液体泵或弹性流体泵 |
----F04B | 液体变容式机械;泵 |
------F04B49/00 | 不包含在F04B1/00至F04B47/00中或与上述组无关的机械、泵或泵送装置的控制,或安全措施 |
--------F04B49/06 | .电控 |